| MEMS for photonic integrated circuits C Errando-Herranz, AY Takabayashi, P Edinger, H Sattari, KB Gylfason, ... IEEE Journal of Selected Topics in Quantum Electronics 26 (2), 1-16, 2019 | 291 | 2019 |
| MEMS-enabled silicon photonic integrated devices and circuits N Quack, H Sattari, AY Takabayashi, Y Zhang, P Verheyen, W Bogaerts, ... IEEE Journal of Quantum Electronics 56 (1), 1-10, 2019 | 95 | 2019 |
| Silicon photonic microelectromechanical phase shifters for scalable programmable photonics P Edinger, AY Takabayashi, C Errando-Herranz, U Khan, H Sattari, ... Optics Letters 46 (22), 5671-5674, 2021 | 83 | 2021 |
| Integrated silicon photonic MEMS N Quack, AY Takabayashi, H Sattari, P Edinger, G Jo, SJ Bleiker, ... Microsystems & Nanoengineering 9 (1), 27, 2023 | 58 | 2023 |
| Wafer-level vacuum sealing by transfer bonding of silicon caps for small footprint and ultra-thin MEMS packages X Wang, SJ Bleiker, P Edinger, C Errando-Herranz, N Roxhed, G Stemme, ... Journal of microelectromechanical systems 28 (3), 460-471, 2019 | 35 | 2019 |
| MORPHIC: programmable photonic circuits enabled by silicon photonic MEMS W Bogaerts, H Sattari, P Edinger, AY Takabayashi, I Zand, X Wang, ... Silicon Photonics XV 11285, 1128503, 2020 | 33 | 2020 |
| Wafer-level hermetically sealed silicon photonic MEMS G Jo, P Edinger, SJ Bleiker, X Wang, AY Takabayashi, H Sattari, N Quack, ... Photonics Research 10 (2), A14-A21, 2022 | 29 | 2022 |
| Three-dimensional printing of silica glass with sub-micrometer resolution PH Huang, M Laakso, P Edinger, O Hartwig, GS Duesberg, LL Lai, ... Nature Communications 14 (1), 3305, 2023 | 26 | 2023 |
| Broadband compact single-pole double-throw silicon photonic MEMS switch AY Takabayashi, H Sattari, P Edinger, P Verheyen, KB Gylfason, ... Journal of Microelectromechanical Systems 30 (2), 322-329, 2021 | 25 | 2021 |
| Low-loss MEMS phase shifter for large scale reconfigurable silicon photonics P Edinger, C Errando-Herranz, KB Gylfason 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems …, 2019 | 18 | 2019 |
| Low power optical phase shifter using liquid crystal actuation on a silicon photonics platform L Van Iseghem, E Picavet, AY Takabayashi, P Edinger, U Khan, ... Optical Materials Express 12 (6), 2181-2198, 2022 | 17 | 2022 |
| Compact low loss MEMS phase shifters for scalable field-programmable silicon photonics P Edinger, C Errando-Herranz, AY Takabayashi, H Sattari, N Quack, ... CLEO: Science and Innovations, SM3J. 2, 2020 | 16 | 2020 |
| A bistable silicon photonic mems phase switch for nonvolatile photonic circuits P Edinger, AY Takabayashi, C Errando–Herranz, U Khan, C Antony, ... 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems …, 2022 | 13 | 2022 |
| Wafer-level vacuum sealing for packaging of silicon photonic MEMS G Jo, P Edinger, SJ Bleiker, X Wang, AY Takabayashi, H Sattari, N Quack, ... Silicon Photonics XVI 11691, 51-57, 2021 | 10 | 2021 |
| Low-voltage silicon photonic MEMS switch with vertical actuation H Sattari, AY Takabayashi, P Edinger, P Verheyen, KB Gylfason, ... 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems …, 2021 | 10 | 2021 |
| Vacuum-sealed silicon photonic MEMS tunable ring resonator with an independent control over coupling and phase P Edinger, G Jo, CP Van Nguyen, AY Takabayashi, C Errando-Herranz, ... Optics Express 31 (4), 6540-6551, 2023 | 8 | 2023 |
| Liquid crystal phase shifter integrated in a silicon photonics platform L Van Iseghem, U Khan, P Edinger, C Errando-Herranz, AY Takabayashi, ... 22nd European Conference on Integrated Optics, ECIO 2020, 2020 | 7 | 2020 |
| Silicon photonic microelectromechanical systems add-drop ring resonator in a foundry process H Sattari, AY Takabayashi, P Edinger, P Verheyen, KB Gylfason, ... Journal of Optical Microsystems 2 (4), 044001, 2022 | 6 | 2022 |
| Programmable silicon photonic circuits powered by MEMS W Bogaerts, AY Takabayashi, P Edinger, G Jo, I Zand, P Verheyen, ... Smart Photonic and Optoelectronic Integrated Circuits 2022 12005, 55-69, 2022 | 6 | 2022 |
| Continuously Tunable Silicon Photonic MEMS Power Coupler AY Takabayashi, H Sattari, P Edinger, P Verheyen, KB Gylfason, ... 2021 21st International Conference on Solid-State Sensors, Actuators and …, 2021 | 5 | 2021 |
