Harrie A. C. Tilmans
Harrie A. C. Tilmans
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Pull-in voltage analysis of electrostatically actuated beam structures with fixed–fixed and fixed–free end conditions
S Pamidighantam, R Puers, K Baert, HAC Tilmans
Journal of micromechanics and microengineering 12 (4), 458, 2002
Electrostatically driven vacuum-encapsulated polysilicon resonators: Part II. Theory and performance
HAC Tilmans, R Legtenberg
Sensors and Actuators A: physical 45 (1), 67-84, 1994
Equivalent circuit representation of electromechanical transducers: I. Lumped-parameter systems
HAC Tilmans
Journal of Micromechanics and Microengineering 6 (1), 157, 1996
Micro resonant force gauges
HAC Tilmans, M Elwenspoek, JHJ Fluitman
Sensors and Actuators A: Physical 30 (1-2), 35-53, 1992
Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanisms
R Legtenberg, HAC Tilmans, J Elders, M Elwenspoek
Sensors and actuators A: Physical 43 (1-3), 230-238, 1994
MEMS for wireless communications:‘from RF-MEMS components to RF-MEMS-SiP’
HAC Tilmans, W De Raedt, E Beyne
Journal of Micromechanics and Microengineering 13 (4), S139, 2003
Electrostatically driven vacuum-encapsulated polysilicon resonators Part I. Design and fabrication
R Legtenberg, HAC Tilmans
Sensors and Actuators A: Physical 45 (1), 57-66, 1994
Equivalent circuit representation of electromechanical transducers: II. Distributed-parameter systems
HAC Tilmans
Journal of Micromechanics and Microengineering 7 (4), 285, 1997
Fine-grained polysilicon films with built-in tensile strain
H Guckel, DW Burns, CCG Visser, HAC Tilmans, D Deroo
IEEE Transactions on Electron Devices 35 (6), 800-801, 1988
LPCVD silicon‐rich silicon nitride films for applications in micromechanics, studied with statistical experimental design
JGE Gardeniers, HAC Tilmans, CCG Visser
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 14 (5 …, 1996
Analytical model of the DC actuation of electrostatic MEMS devices with distributed dielectric charging and nonplanar electrodes
X Rottenberg, I De Wolf, BKJC Nauwelaers, W De Raedt, HAC Tilmans
Journal of Microelectromechanical Systems 16 (5), 1243-1253, 2007
Investigation of the hermeticity of BCB-sealed cavities for housing (RF-) MEMS devices
A Jourdain, P De Moor, S Pamidighantam, HAC Tilmans
Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE …, 2002
Static and dynamic aspects of an air-gap capacitor
DJ Ijntema, HAC Tilmans
Sensors and Actuators A: Physical 35 (2), 121-128, 1992
Design considerations and technology assessment of phased-array antenna systems with RF MEMS for automotive radar applications
J Schoebel, T Buck, M Reimann, M Ulm, M Schneider, A Jourdain, ...
IEEE Transactions on Microwave Theory and Techniques 53 (6), 1968-1975, 2005
The indent reflow sealing (IRS) technique-a method for the fabrication of sealed cavities for MEMS devices
HAC Tilmans, DJ Van de Peer, E Beyne
Journal of microelectromechanical systems 9 (2), 206-217, 2000
Through-silicon via and die stacking technologies for microsystems-integration
E Beyne, P De Moor, W Ruythooren, R Labie, A Jourdain, H Tilmans, ...
2008 IEEE International Electron Devices Meeting, 1-4, 2008
A fully-packaged electromagnetic microrelay
HAC Tilmans, E Fullin, H Ziad, MDJ Van de Peer, J Kesters, E Van Geffen, ...
Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE …, 1999
Nonlinearity and hysteresis of resonant strain gauges
C Gui, R Legtenberg, HAC Tilmans, JHJ Fluitman, M Elwenspoek
Journal of Microelectromechanical Systems 7 (1), 122-127, 1998
Mechanical properties of fine grained polysilicon-the repeatability issue
H Guckel, DW Burns, HAC Tilmans, DW DeRoo, CR Rutigliano
IEEE technical digest on solid-state sensor and actuator workshop, 96-99, 1988
Distributed dielectric charging and its impact on RF MEMS devices
X Rottenberg, B Nauwelaers, W De Raedt, HAC Tilmans
34th European Microwave Conference, 2004. 1, 77-80, 2004
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