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Umer Shah
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A very low loss 220–325 GHz silicon micromachined waveguide technology
B Beuerle, J Campion, U Shah, J Oberhammer
IEEE Transactions on Terahertz science and technology 8 (2), 248-250, 2018
562018
A 500–750 GHz RF MEMS Waveguide Switch
U Shah, T Reck, H Frid, C Jung-Kubiak, G Chattopadhyay, I Mehdi, ...
IEEE Transactions on Terahertz Science and Technology 7 (3), 326-334, 2017
502017
Submillimeter-wave 3.3-bit RF MEMS phase shifter integrated in micromachined waveguide
U Shah, E Decrossas, C Jung-Kubiak, T Reck, G Chattopadhyay, I Mehdi, ...
IEEE Transactions on Terahertz Science and Technology 6 (5), 706-715, 2016
502016
High-aspect-ratio through silicon vias for high-frequency application fabricated by magnetic assembly of gold-coated nickel wires
SJ Bleiker, AC Fischer, U Shah, N Somjit, T Haraldsson, N Roxhed, ...
IEEE Transactions on components, packaging and Manufacturing technology 5 (1 …, 2014
462014
Micromachined Filters at 450 GHz With 1% Fractional Bandwidth and Unloaded Q Beyond 700
O Glubokov, X Zhao, J Campion, U Shah, J Oberhammer
IEEE Transactions on Terahertz Science and Technology 9 (1), 106-108, 2018
322018
Micromachined multilayer bandpass filter at 270 GHz using dual-mode circular cavities
O Glubokov, X Zhao, B Beuerle, J Campion, U Shah, J Oberhammer
2017 IEEE MTT-S International Microwave Symposium (IMS), 1449-1452, 2017
302017
Compact silicon-micromachined wideband 220–330-GHz turnstile orthomode transducer
A Gomez-Torrent, U Shah, J Oberhammer
IEEE Transactions on Terahertz Science and Technology 9 (1), 38-46, 2018
272018
High-directivity MEMS-tunable directional couplers for 10–18-GHz broadband applications
U Shah, M Sterner, J Oberhammer
IEEE transactions on microwave theory and techniques 61 (9), 3236-3246, 2013
262013
Toward industrial exploitation of THz frequencies: Integration of SiGe MMICs in silicon-micromachined waveguide systems
J Campion, A Hassona, ZS He, B Beuerle, A Gomez-Torrent, U Shah, ...
IEEE Transactions on Terahertz Science and Technology 9 (6), 624-636, 2019
232019
Elliptical alignment holes enabling accurate direct assembly of micro-chips to standard waveguide flanges at sub-THz frequencies
J Campion, U Shah, J Oberhammer
2017 IEEE MTT-S International Microwave Symposium (IMS), 1262-1265, 2017
232017
Microwave MEMS devices designed for process robustness and operational reliability
M Sterner, N Somjit, U Shah, S Dudorov, D Chicherin, A Räisänen, ...
International Journal of Microwave and Wireless Technologies 3 (5), 547-563, 2011
232011
An ultra low-loss silicon-micromachined waveguide filter for D-band telecommunication applications
J Campion, O Glubokov, A Gomez, A Krivovitca, U Shah, L Bolander, Y Li, ...
2018 IEEE/MTT-S International Microwave Symposium-IMS, 583-586, 2018
202018
Investigation of Fabrication Accuracy and Repeatability of High- Silicon-Micromachined Narrowband Sub-THz Waveguide Filters
O Glubokov, X Zhao, J Campion, B Beuerle, U Shah, J Oberhammer
IEEE Transactions on Microwave Theory and Techniques 67 (9), 3696-3706, 2019
192019
A 230–300 GHz low-loss micromachined waveguide hybrid coupler
J Svedin, R Malmqvist, B Beuerle, U Shah, J Oberhammer
2017 47th European microwave conference (EuMC), 616-619, 2017
192017
Silicon micromachined D-band diplexer using releasable filling structure technique
X Zhao, O Glubokov, J Campion, A Gomez-Torrent, A Krivovitca, U Shah, ...
IEEE Transactions on Microwave Theory and Techniques 68 (8), 3448-3460, 2020
182020
Multi-position RF MEMS tunable capacitors using laterally moving sidewalls of 3-D micromachined transmission lines
U Shah, M Sterner, J Oberhammer
IEEE Transactions on Microwave theory and techniques 61 (6), 2340-2352, 2013
162013
Low-loss, high-linearity RF interposers enabled by through glass vias
U Shah, J Liljeholm, J Campion, T Ebefors, J Oberhammer
IEEE Microwave and Wireless Components Letters 28 (11), 960-962, 2018
152018
A 220–325 GHz low-loss micromachined waveguide power divider
R Malmqvist, A Gustafsson, J Svedin, B Beuerle, U Shah, J Oberhammer
2017 IEEE Asia Pacific Microwave Conference (APMC), 291-294, 2017
142017
Integrated micromachined waveguide absorbers at 220–325 GHz
B Beuerle, J Campion, U Shah, J Oberhammer
2017 47th European Microwave Conference (EuMC), 695-698, 2017
122017
500-750 GHz submillimeter-wave MEMS waveguide switch
U Shah, T Reck, E Decrossas, C Jung-Kubiak, H Frid, G Chattopadhyay, ...
2016 IEEE MTT-S International Microwave Symposium (IMS), 1-4, 2016
112016
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