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Martin Lapke
Martin Lapke
Hamburg University of Applied Science
Verified email at haw-hamburg.de
Title
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Cited by
Year
The multipole resonance probe: A concept for simultaneous determination of plasma density, electron temperature, and collision rate in low-pressure plasmas
M Lapke, T Mussenbrock, RP Brinkmann
Applied Physics Letters 93 (5), 2008
1042008
The multipole resonance probe: characterization of a prototype
M Lapke, J Oberrath, C Schulz, R Storch, T Styrnoll, C Zietz, P Awakowicz, ...
Plasma Sources Science and Technology 20 (4), 042001, 2011
862011
Modeling and simulation of the plasma absorption probe
M Lapke, T Mussenbrock, RP Brinkmann, C Scharwitz, M Böke, J Winter
Applied physics letters 90 (12), 2007
632007
Process diagnostics and monitoring using the multipole resonance probe in an inhomogeneous plasma for ion-assisted deposition of optical coatings
T Styrnoll, J Harhausen, M Lapke, R Storch, RP Brinkmann, R Foest, ...
Plasma Sources Science and Technology 22 (4), 045008, 2013
392013
Active plasma resonance spectroscopy: a functional analytic description
M Lapke, J Oberrath, T Mussenbrock, RP Brinkmann
Plasma Sources Science and Technology 22 (2), 025005, 2013
352013
Study on electrostatic and electromagnetic probes operated in ceramic and metallic depositing plasmas
T Styrnoll, S Bienholz, M Lapke, P Awakowicz
Plasma Sources Science and Technology 23 (2), 025013, 2014
222014
Practical implementation of a two-hemisphere plasma absorption probe
C Scharwitz, M Böke, J Winter, M Lapke, T Mussenbrock, RP Brinkmann
Applied Physics Letters 94 (1), 2009
212009
Plasma etching and stealth dicing laser process
G Albermann, S Moeller, T Rohleder, M Lapke, H Buenning
US Patent 9,601,437, 2017
182017
Plasma dicing with blade saw patterned underside mask
T Rohleder, H Buenning, G Albermann, S Moeller, M Lapke
US Patent 9,847,258, 2017
172017
High die strength semiconductor wafer processing method and system
H Buenning, S Moeller, M Lapke, G Albermann, T Rohleder
US Patent 8,809,166, 2014
142014
The multipole resonance probe: Investigation of an active plasma resonance probe using 3D-electromagnetic field simulations
C Schulz, I Rolfes, T Styrnoll, P Awakowicz, M Lapke, J Oberrath, ...
2012 42nd European Microwave Conference, 566-569, 2012
142012
The multipole resonance probe: Realization of an optimized radio-frequency plasma probe based on active plasma resonance spectroscopy
C Schulz, M Lapke, J Oberrath, R Storch, T Styrmoll, C Zietz, P Awakowicz, ...
IEEE Middle East Conference on Antennas and Propagation (MECAP 2010), 1-5, 2010
142010
Wafer separation
S Moeller, M Lapke
US Patent App. 13/687,110, 2014
102014
A novel radio-frequency plasma probe for monitoring systems in dielectric deposition processes
C Schulz, T Styrnoll, M Lapke, J Oberrath, R Storch, P Awakowicz, ...
2012 International Conference on Electromagnetics in Advanced Applications …, 2012
102012
Usage of electromagnetic modeling of the multipole resonance probe
M Lapke, C Schulz, J Oberrath, R Storch, T Styrnoll, P Awakowicz, ...
2011 International Conference on Phenomena in Ionized Gases, 2011
92011
Physics of the Advanced Plasma Source: a review of recent experimental and modeling approaches
RP Brinkmann, J Harhausen, B Schröder, M Lapke, R Storch, T Styrnoll, ...
Plasma Physics and Controlled Fusion 58 (1), 014033, 2015
62015
A functional analytic description of active plasma resonance spectroscopy in terms of kinetic theory
J Oberrath, M Lapke, T Mussenbrock, RP Brinkmann
Proceedings of the 30th International Conference on Phenomena in Ionized …, 2011
62011
Analyse und Optimierung der Multipolresonanzsonde als industrietaugliches Plasmadiagnostiksystem
M Lapke
Logos Verlag Berlin GmbH, 2011
62011
Modelling of volume-and surface wave based plasma resonance spectroscopy
M Lapke, T Mussenbrock, RP Brinkmann
2010 Abstracts IEEE International Conference on Plasma Science, 1-1, 2010
62010
Combination grinding after laser (GAL) and laser on-off function to increase die strength
H Buenning, S Moeller, G Albermann, M Lapke, T Rohleder
US Patent 9,812,361, 2017
52017
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