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C. Mike Waits, Christopher M. Waits, C. Michael Waits, Christopher Waits, Christopher Michael Waits
C. Mike Waits, Christopher M. Waits, C. Michael Waits, Christopher Waits, Christopher Michael Waits
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Title
Cited by
Cited by
Year
Microfabrication of 3D silicon MEMS structures using gray-scale lithography and deep reactive ion etching
CM Waits, B Morgan, M Kastantin, R Ghodssi
Sensors and Actuators A: Physical 119 (1), 245-253, 2005
2542005
Investigation of gray-scale technology for large area 3D silicon MEMS structures
CM Waits, A Modafe, R Ghodssi
Journal of Micromechanics and Microengineering 13 (2), 170, 2002
2032002
Development of a deep silicon phase Fresnel lens using gray-scale lithography and deep reactive ion etching
B Morgan, CM Waits, J Krizmanic, R Ghodssi
Journal of microelectromechanical systems 13 (1), 113-120, 2004
1682004
Compact multiplexing of monodisperse electrosprays
W Deng, CM Waits, B Morgan, A Gomez
Journal of Aerosol Science 40 (10), 907-918, 2009
1092009
Chalcogenide glass e-beam and photoresists for ultrathin grayscale patterning
A Kovalskiy, J Cech, M Vlcek, CM Waits, M Dubey, WR Heffner, H Jain
Journal of Micro/Nanolithography, MEMS and MOEMS 8 (4), 043012-043012-11, 2009
762009
Double-exposure grayscale photolithography
L Mosher, CM Waits, B Morgan, R Ghodssi
Journal of microelectromechanical systems 18 (2), 308-315, 2009
732009
Development of chalcogenide glass photoresists for gray scale lithography
A Kovalskiy, M Vlcek, H Jain, A Fiserova, CM Waits, M Dubey
Journal of non-crystalline solids 352 (6-7), 589-594, 2006
552006
Dynamic friction and wear in a planar-contact encapsulated microball bearing using an integrated microturbine
M McCarthy, CM Waits, R Ghodssi
Journal of Microelectromechanical Systems 18 (2), 263-273, 2009
532009
Encapsulated ball bearings for rotary micro machines
CM Waits, B Geil, R Ghodssi
Journal of Micromechanics and Microengineering 17 (9), S224, 2007
452007
MEMS-based gray-scale lithography
CM Waits, R Ghodssi, MH Ervin, M Dubey
2001 International Semiconductor Device Research Symposium. Symposium …, 2001
372001
A rotary microactuator supported on encapsulated microball bearings using an electro-pneumatic thrust balance
M McCarthy, CM Waits, MI Beyaz, R Ghodssi
Journal of Micromechanics and Microengineering 19 (9), 094007, 2009
352009
A microfabricated spiral-groove turbopump supported on microball bearings
CM Waits, M McCarthy, R Ghodssi
Journal of microelectromechanical systems 19 (1), 99-109, 2009
292009
Analysis of a high throughput n-dodecane fueled heterogeneous/homogeneous parallel plate microreactor for portable power conversion
ED Tolmachoff, W Allmon, CM Waits
Applied energy 128, 111-118, 2014
262014
Catalytic combustion of alcohols for microburner applications
DA Behrens, IC Lee, CM Waits
Journal of Power Sources 195 (7), 2008-2013, 2010
262010
Digital electrospray for controlled deposition
W Deng, CM Waits, A Gomez
Review of Scientific Instruments 81 (3), 035114, 2010
232010
Compensated aspect ratio dependent etching (CARDE) using gray-scale technology
B Morgan, CM Waits, R Ghodssi
microelectronic engineering 77 (1), 85-94, 2005
182005
Improved pyroelectric performance for thin film lead zirconate titanate (PZT) capacitors with IrO2 electrodes
B Hanrahan, L Sanchez, CM Waits, RG Polcawich
Smart Materials and Structures 25 (1), 015025, 2015
172015
On the mechanism of gray scale patterning of Ag-containing As2S3 thin films
A Kovalskiy, H Jain, J Neilson, M Vlcek, CM Waits, W Churaman, ...
Journal of Physics and Chemistry of Solids 68 (5-6), 920-925, 2007
172007
Wireless power transmission via modulated laser irradiation of pyroelectric thin films
B Hanrahan, C Neville, A Smith, N Ter‐Gabrielyan, N Jankowski, ...
Advanced Materials Technologies 1 (9), 1600178, 2016
162016
Multiplexed electrospray scaling for liquid fuel injection
CM Waits, B Hanrahan, I Lee
Journal of Micromechanics and Microengineering 20 (10), 104010, 2010
162010
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Articles 1–20