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Rajeev Rajendran
Rajeev Rajendran
KLA Corporation
Verified email at kla-tencor.com
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Year
A compact laser-driven plasma accelerator for megaelectronvolt-energy neutral atoms
R Rajeev, T Madhu Trivikram, KPM Rishad, V Narayanan, ...
Nature Physics 9 (3), 185-190, 2013
1022013
RESCAN: an actinic lensless microscope for defect inspection of EUV reticles
I Mochi, P Helfenstein, I Mohacsi, R Rajeev, D Kazazis, S Yoshitake, ...
Journal of Micro/Nanolithography, MEMS, and MOEMS 16 (4), 041003-041003, 2017
372017
A Thomson parabola ion imaging spectrometer designed to probe relativistic intensity ionization dynamics of nanoclusters
R Rajeev, KPM Rishad, TM Trivikram, V Narayanan, M Krishnamurthy
Review of Scientific Instruments 82 (8), 2011
352011
Beam drift and partial probe coherence effects in EUV reflective-mode coherent diffractive imaging
P Helfenstein, R Rajeev, I Mochi, A Kleibert, CAF Vaz, Y Ekinci
Optics Express 26 (9), 12242-12256, 2018
282018
Time-resolved photoelectron imaging with a femtosecond vacuum-ultraviolet light source: Dynamics in the A∼/B∼-and F∼-bands of SO2
V Svoboda, NB Ram, R Rajeev, HJ Wörner
The Journal of chemical physics 146 (8), 2017
282017
Photoionization of clusters in intense few-cycle near infrared femtosecond pulses
SR Krishnan, R Gopal, R Rajeev, J Jha, V Sharma, M Mudrich, ...
Physical Chemistry Chemical Physics 16 (19), 8721-8730, 2014
282014
Direct, Absolute, and In Situ Measurement of Fast Electron Transport via Cherenkov Emission
H Habara, K Ohta, KA Tanaka, GR Kumar, M Krishnamurthy, S Kahaly, ...
Physical review letters 104 (5), 055001, 2010
252010
Scanning coherent diffractive imaging methods for actinic extreme ultraviolet mask metrology
P Helfenstein, I Mohacsi, R Rajeev, Y Ekinci
Journal of Micro/Nanolithography, MEMS, and MOEMS 15 (3), 034006-034006, 2016
232016
A bright point source of ultrashort hard x-ray pulses using biological cells
M Krishnamurthy, S Mondal, AD Lad, K Bane, S Ahmed, V Narayanan, ...
Optics Express 20 (5), 5754-5761, 2012
222012
Towards a stand-alone high-throughput EUV actinic photomask inspection tool: RESCAN
R Rajendran, I Mochi, P Helfenstein, I Mohacsi, S Redford, A Mozzanica, ...
Metrology, Inspection, and Process Control for Microlithography XXXI 10145 …, 2017
212017
Calibration status and plans for the charge integrating JUNGFRAU pixel detector for SwissFEL
S Redford, A Bergamaschi, M Brückner, S Cartier, R Dinapoli, Y Ekinci, ...
Journal of Instrumentation 11 (11), C11013, 2016
212016
Actinic inspection of EUV reticles with arbitrary pattern design
I Mochi, P Helfenstein, R Rajeev, S Fernandez, D Kazazis, S Yoshitake, ...
International Conference on Extreme Ultraviolet Lithography 2017 10450, 28-37, 2017
202017
Bacterial cells enhance laser driven ion acceleration
M Dalui, M Kundu, TM Trivikram, R Rajeev, K Ray, M Krishnamurthy
Scientific reports 4 (1), 6002, 2014
202014
Decrypting the charge-resolved kinetic-energy spectrum in the Coulomb explosion of argon clusters
R Rajeev, KPM Rishad, TM Trivikram, V Narayanan, T Brabec, ...
Physical Review A—Atomic, Molecular, and Optical Physics 85 (2), 023201, 2012
202012
Quantitative characterization of absorber and phase defects on EUV reticles using coherent diffraction imaging
I Mochi, S Fernandez, R Nebling, U Locans, R Rajeev, A Dejkameh, ...
Journal of Micro/Nanolithography, MEMS, and MOEMS 19 (1), 014002-014002, 2020
172020
Generation of energetic negative ions from clusters using intense laser fields
R Rajeev, TM Trivikram, KPM Rishad, V Narayanan, M Krishnamurthy
New Journal of Physics 15 (4), 043036, 2013
172013
Anomalous ion charge distribution from cluster nanoplasmas
TM Trivikram, R Rajeev, KPM Rishad, J Jha, M Krishnamurthy
Physical review letters 111 (14), 143401, 2013
162013
Absorber and phase defect inspection on EUV reticles using RESCAN
I Mochi, S Fernandez, R Nebling, U Locans, P Helfenstein, R Rajeev, ...
Extreme Ultraviolet (EUV) Lithography X 10957, 211-218, 2019
152019
Measurement of the spatio-temporal gas density profile of a supersonic jet
R Rajeev, SV Raja, T Madhu Trivikram, KPM Rishad, M Krishnamurthy
Journal of Applied Physics 114 (8), 2013
142013
Coherent diffractive imaging methods for semiconductor manufacturing
P Helfenstein, I Mochi, R Rajeev, S Fernandez, Y Ekinci
Advanced Optical Technologies 6 (6), 439-448, 2017
132017
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