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Sebastian Wilczek
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Electron dynamics in low pressure capacitively coupled radio frequency discharges
S Wilczek, J Schulze, RP Brinkmann, Z Donkó, J Trieschmann, ...
Journal of Applied Physics 127 (18), 2020
952020
The effect of the driving frequency on the confinement of beam electrons and plasma density in low-pressure capacitive discharges
S Wilczek, J Trieschmann, J Schulze, E Schuengel, RP Brinkmann, ...
Plasma Sources Science and Technology 24 (2), 024002, 2015
912015
Kinetic interpretation of resonance phenomena in low pressure capacitively coupled radio frequency plasmas
S Wilczek, J Trieschmann, D Eremin, RP Brinkmann, J Schulze, ...
Physics of Plasmas 23 (6), 2016
782016
Spatio-temporal analysis of the electron power absorption in electropositive capacitive RF plasmas based on moments of the Boltzmann equation
J Schulze, Z Donko, T Lafleur, S Wilczek, RP Brinkmann
Plasma Sources Science and Technology 27 (5), 055010, 2018
762018
The effect of realistic heavy particle induced secondary electron emission coefficients on the electron power absorption dynamics in single-and dual-frequency capacitively …
M Daksha, A Derzsi, S Wilczek, J Trieschmann, T Mussenbrock, ...
Plasma Sources Science and Technology 26 (8), 085006, 2017
512017
Voltage waveform tailoring in radio frequency plasmas for surface charge neutralization inside etch trenches
F Krüger, S Wilczek, T Mussenbrock, J Schulze
Plasma Sources Science and Technology 28 (7), 075017, 2019
422019
eduPIC: an introductory particle based code for radio-frequency plasma simulation
Z Donkó, A Derzsi, M Vass, B Horváth, S Wilczek, B Hartmann, ...
Plasma Sources Science and Technology 30 (9), 095017, 2021
392021
Disparity between current and voltage driven capacitively coupled radio frequency discharges
S Wilczek, J Trieschmann, J Schulze, Z Donko, RP Brinkmann, ...
Plasma Sources Science and Technology 27 (12), 125010, 2018
342018
Observation of dominant Ohmic electron power absorption in capacitively coupled radio frequency argon discharges at low pressure
M Vass, S Wilczek, T Lafleur, RP Brinkmann, Z Donko, J Schulze
Plasma Sources Science and Technology 29 (8), 085014, 2020
272020
Charged particle dynamics and distribution functions in low pressure dual-frequency capacitively coupled plasmas operated at low frequencies and high voltages
P Hartmann, L Wang, K Nösges, B Berger, S Wilczek, RP Brinkmann, ...
Plasma Sources Science and Technology 29 (7), 075014, 2020
262020
Electron power absorption in low pressure capacitively coupled electronegative oxygen radio frequency plasmas
M Vass, S Wilczek, T Lafleur, RP Brinkmann, Z Donkó, J Schulze
Plasma Sources Science and Technology 29 (2), 025019, 2020
232020
Control of electron velocity distributions at the wafer by tailored voltage waveforms in capacitively coupled plasmas to compensate surface charging in high-aspect ratio etch …
P Hartmann, L Wang, K Nösges, B Berger, S Wilczek, RP Brinkmann, ...
Journal of Physics D: Applied Physics 54 (25), 255202, 2021
202021
Electron power absorption in micro atmospheric pressure plasma jets driven by tailored voltage waveforms in He/N2
M Vass, S Wilczek, J Schulze, Z Donko
Plasma Sources Science and Technology 30 (10), 105010, 2021
92021
Electron dynamics in planar radio frequency magnetron plasmas: I. The mechanism of Hall heating and the µ-mode
D Eremin, D Engel, D Krüger, S Wilczek, B Berger, M Oberberg, C Wölfel, ...
Plasma Sources Science and Technology 32 (4), 045007, 2023
52023
Simulation and modeling of radio-frequency atmospheric pressure plasmas in the non-neutral regime
M Klich, S Wilczek, Z Donkó, RP Brinkmann
Plasma Sources Science and Technology 31 (4), 045003, 2022
52022
Collisional electron momentum loss in low temperature plasmas: on the validity of the classical approximation
M Vass, S Wilczek, T Lafleur, RP Brinkmann, Z Donkó, J Schulze
Plasma Sources Science and Technology 30 (6), 065015, 2021
52021
Frequency coupling in low-pressure dual-frequency capacitively coupled plasmas revisited based on the Boltzmann term analysis
M Vass, L Wang, S Wilczek, T Lafleur, RP Brinkmann, Z Donkó, J Schulze
Plasma Sources Science and Technology 31 (11), 115004, 2022
32022
Validation of the smooth step model by particle-in-cell/Monte Carlo collisions simulations
M Klich, J Löwer, S Wilczek, T Mussenbrock, RP Brinkmann
Plasma Sources Science and Technology 31 (4), 045014, 2022
32022
Interactions between flow fields induced by surface dielectric barrier discharge arrays
A Böddecker, M Passmann, S Wilczek, L Schücke, I Korolov, R Skoda, ...
Plasma Chemistry and Plasma Processing 43 (6), 1509-1530, 2023
22023
Ion dynamics in capacitively coupled argon–xenon discharges
M Klich, S Wilczek, JFJ Janssen, RP Brinkmann, T Mussenbrock, ...
Plasma Sources Science and Technology 30 (6), 065019, 2021
22021
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