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Vibhu Jindal
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Cited by
Year
Theoretical prediction of GaN nanostructure equilibrium and nonequilibrium shapes
V Jindal, F Shahedipour-Sandvik
Journal of Applied Physics 106 (8), 2009
1232009
Density functional theoretical study of surface structure and adatom kinetics for wurtzite AlN
V Jindal, F Shahedipour-Sandvik
Journal of Applied Physics 105 (8), 2009
1042009
Development of strain reduced GaN on Si (111) by substrate engineering
M Jamil, JR Grandusky, V Jindal, F Shahedipour-Sandvik, S Guha, M Arif
Applied Physics Letters 87 (8), 2005
662005
Extreme ultraviolet mask blank with alloy absorber and method of manufacture
V Jindal
US Patent 10,877,368, 2020
422020
Extreme ultraviolet mask blank with multilayer absorber and method of manufacture
V Jindal
US Patent 10,747,102, 2020
422020
Mechanism of large area dislocation defect reduction in GaN layers on AlN∕ Si (111) by substrate engineering
M Jamil, JR Grandusky, V Jindal, N Tripathi, F Shahedipour-Sandvik
Journal of Applied Physics 102 (2), 2007
392007
Direct immobilization and hybridization of DNA on group III nitride semiconductors
X Xu, V Jindal, F Shahedipour-Sandvik, M Bergkvist, NC Cady
Applied Surface Science 255 (11), 5905-5909, 2009
352009
Computational and experimental studies on the growth of nonpolar surfaces of gallium nitride
V Jindal, F Shahedipour-Sandvik
Journal of Applied Physics 107 (5), 2010
342010
EUV mask defects and their removal
A Rastegar, V Jindal
28th European Mask and Lithography Conference 8352, 306-317, 2012
332012
Physical vapor deposition chamber with static magnet assembly and methods of sputtering
S Behara, S Bhat, V Jindal
US Patent 10,504,705, 2019
322019
Nanocrystalline gold and gold–palladium as effective catalysts for selective oxidation
J Edwards, P Landon, AF Carley, AA Herzing, M Watanabe, CJ Kiely, ...
Journal of materials research 22 (4), 831-837, 2007
292007
Identification of subsurface damage in freestanding HVPE GaN substrates and its influence on epitaxial growth of GaN epilayers
JR Grandusky, V Jindal, N Tripathi, F Shahedipour-Sandvik, H Lu, ...
Journal of crystal growth 307 (2), 309-314, 2007
272007
Extreme ultraviolet mask blank with multilayer absorber and method of manufacture
V Jindal
US Patent 11,022,876, 2021
242021
Modeling the EUV multilayer deposition process on EUV blanks
V Jindal, P Kearney, J Harris-Jones, A Hayes, J Kools
Extreme Ultraviolet (EUV) Lithography II 7969, 450-458, 2011
202011
Density functional calculations of the strain effects on binding energies and adatom diffusion on (0 0 0 1) GaN surfaces
JR Grandusky, V Jindal, JE Raynolds, S Guha, F Shahedipour-Sandvik
Materials Science and Engineering: B 158 (1-3), 13-18, 2009
172009
Actinic review of EUV masks: status and recent results of the AIMS EUV system
MR Weiss, D Hellweg, M Koch, JH Peters, S Perlitz, A Garetto, ...
Extreme Ultraviolet (EUV) Lithography VI 9422, 395-403, 2015
152015
Selective area heteroepitaxy of low dimensional a ‐plane and c ‐plane InGaN nanostructures using pulsed MOCVD
V Jindal, N Tripathi, M Tungare, O Paschos, P Haldar, ...
physica status solidi c 5 (6), 1709-1711, 2008
142008
Extreme ultraviolet mask absorber materials
S Liu, V Jindal
US Patent App. 16/877,962, 2020
132020
Inspection and compositional analysis of sub-20 nm EUV mask blank defects by thin film decoration technique
V Jindal, A John, J Harris-Jones, P Kearney, A Antohe, E Stinzianni, ...
Extreme Ultraviolet (EUV) Lithography IV 8679, 478-487, 2013
132013
Inspecting mask defects with through-focus scanning optical microscopy
R Attota, V Jindal
SPIE newsroom 4964, 2013
122013
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