| Graphoepitaxy of self-assembled block copolymers on two-dimensional periodic patterned templates I Bita, JKW Yang, YS Jung, CA Ross, EL Thomas, KK Berggren Science 321 (5891), 939-943, 2008 | 942 | 2008 |
| Using light as a lens for submicron, neutral-atom lithography G Timp, RE Behringer, DM Tennant, JE Cunningham, M Prentiss, ... Physical review letters 69 (11), 1636, 1992 | 590 | 1992 |
| Resolution limits of electron-beam lithography toward the atomic scale VR Manfrinato, L Zhang, D Su, H Duan, RG Hobbs, EA Stach, ... Nano letters 13 (4), 1555-1558, 2013 | 559 | 2013 |
| Mach-Zehnder interferometry in a strongly driven superconducting qubit WD Oliver, Y Yu, JC Lee, KK Berggren, LS Levitov, TP Orlando Science 310 (5754), 1653-1657, 2005 | 546 | 2005 |
| Kinetic-inductance-limited reset time of superconducting nanowire photon counters AJ Kerman, EA Dauler, WE Keicher, JKW Yang, KK Berggren, ... Applied physics letters 88 (11), 2006 | 545 | 2006 |
| Demonstration of sub-3 ps temporal resolution with a superconducting nanowire single-photon detector B Korzh, QY Zhao, JP Allmaras, S Frasca, TM Autry, EA Bersin, AD Beyer, ... Nature Photonics 14 (4), 250-255, 2020 | 541 | 2020 |
| Nanowire single-photon detector with an integrated optical cavity and anti-reflection coating KM Rosfjord, JKW Yang, EA Dauler, AJ Kerman, V Anant, BM Voronov, ... Optics express 14 (2), 527-534, 2006 | 529 | 2006 |
| MoS2 Field-Effect Transistor with Sub-10 nm Channel Length A Nourbakhsh, A Zubair, RN Sajjad, A Tavakkoli KG, W Chen, S Fang, ... Nano letters 16 (12), 7798-7806, 2016 | 464 | 2016 |
| On-chip detection of non-classical light by scalable integration of single-photon detectors F Najafi, J Mower, NC Harris, F Bellei, A Dane, C Lee, X Hu, P Kharel, ... Nature communications 6 (1), 5873, 2015 | 368 | 2015 |
| Microlithography by using neutral metastable atoms and self-assembled monolayers KK Berggren, A Bard, JL Wilbur, JD Gillaspy, AG Helg, JJ McClelland, ... Science 269 (5228), 1255-1257, 1995 | 354 | 1995 |
| Localization of metastable atom beams with optical standing waves: nanolithography at the Heisenberg limit KS Johnson, JH Thywissen, NH Dekker, KK Berggren, AP Chu, ... Science 280 (5369), 1583-1586, 1998 | 351 | 1998 |
| Geometry-dependent critical currents in superconducting nanocircuits JR Clem, KK Berggren Physical Review B—Condensed Matter and Materials Physics 84 (17), 174510, 2011 | 347 | 2011 |
| Microcontact printing on surfaces and derivative articles GM Whitesides, Y Xia, JL Wilbur, RJ Jackman, E Kim, MG Prentiss, ... US Patent 6,180,239, 2001 | 342 | 2001 |
| Methods of etching articles via microcontact printing GM Whitesides, Y Xia, JL Wilbur, RJ Jackman, E Kim, MG Prentiss, ... US Patent 5,900,160, 1999 | 334 | 1999 |
| Complex self-assembled patterns using sparse commensurate templates with locally varying motifs JKW Yang, YS Jung, JB Chang, RA Mickiewicz, A Alexander-Katz, ... Nature nanotechnology 5 (4), 256-260, 2010 | 294 | 2010 |
| Development of quantum interconnects (quics) for next-generation information technologies D Awschalom, KK Berggren, H Bernien, S Bhave, LD Carr, P Davids, ... Prx Quantum 2 (1), 017002, 2021 | 292 | 2021 |
| Templating three-dimensional self-assembled structures in bilayer block copolymer films A Tavakkoli KG, KW Gotrik, AF Hannon, A Alexander-Katz, CA Ross, ... Science 336 (6086), 1294-1298, 2012 | 291 | 2012 |
| Using high-contrast salty development of hydrogen silsesquioxane for sub-10‐nm half-pitch lithography JKW Yang, KK Berggren Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2007 | 291 | 2007 |
| A path to ultranarrow patterns using self-assembled lithography YS Jung, JB Chang, E Verploegen, KK Berggren, CA Ross Nano Letters 10 (3), 1000-1005, 2010 | 287 | 2010 |
| Single-photon detectors based on ultranarrow superconducting nanowires F Marsili, F Najafi, E Dauler, F Bellei, X Hu, M Csete, RJ Molnar, ... Nano letters 11 (5), 2048-2053, 2011 | 277 | 2011 |
Andrew KermanMIT Lincoln LaboratoryVerified email at ll.mit.edu
