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V. S. Vidyarthi
V. S. Vidyarthi
IIT-BHU, IIT-Kanpur, TU Dresden, Ruhr University Bochum, Lam Research Corp, Applied Materials Inc
Verified email at amat.com
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Year
Enhanced photoelectrochemical properties of WO3 thin films fabricated by reactive magnetron sputtering
VS Vidyarthi, M Hofmann, A Savan, K Sliozberg, D König, R Beranek, ...
international journal of hydrogen energy 36 (8), 4724-4731, 2011
1102011
Plasma emission controlled multi-target reactive sputtering for in-situ crystallized Pb (Zr, Ti) O3 thin films on 6 ″Si-wafers
VS Vidyarthi, WM Lin, G Suchaneck, G Gerlach, C Thiele, V Hoffmann
Thin Solid Films 515 (7-8), 3547-3553, 2007
242007
Multi-target reactive sputtering—A promising technology for large-area Pb (Zr, Ti) O3 thin film deposition
G Suchaneck, WM Lin, VS Vidyarthi, G Gerlach, J Hartung
Journal of the European Ceramic Society 27 (13-15), 3789-3792, 2007
172007
Engineered tungsten oxy-nitride thin film materials for photocatalytical water splitting fabricated by MOCVD
S Cwik, AP Milanov, V Gwildies, T Thiede, V Vidyarthi, A Savan, R Meyer, ...
ECS Transactions 28 (8), 159, 2010
122010
Reactive magnetron sputtering from a composite target for large area BaPbO3 thin film electrode
VS Vidyarthi, G Suchaneck, G Gerlach, AA Levin, DC Meyer, R Grötzschel
Thin solid films 518 (15), 4106-4112, 2010
82010
Electron emission from ferroelectric thin films enhanced by the presence of 90° ferroelectric domains
G Suchaneck, VS Vidyarthi, G Gerlach, AV Solnyshkin, IL Kislova
IEEE transactions on ultrasonics, ferroelectrics, and frequency control 54 …, 2007
72007
A model for etching of three-dimensional high aspect ratio silicon structures in pulsed inductively coupled plasmas
JC Wang, W Tian, S Rauf, S Sadighi, J Kenney, P Stout, VS Vidyarthi, ...
Plasma Sources Science and Technology 27 (9), 094003, 2018
62018
Ultra-low voltage ferroelectric electron emission from lead zirconate titanate thin films with nanostructured top electrodes
J Becherer, O Mieth, VS Vidyarthi, G Gerlach, LM Eng
Journal of Applied Physics 110 (1), 2011
52011
Low-voltage electron emission from thin [Pb (Mg1/3Nb2/3) O3] 0.72 [PbTiO3] 0.28 single crystals induced by ferroelectric polarization switching
O Mieth, H Klumbies, VS Vidyarthi, G Gerlach, K Dörr, LM Eng
New Journal of Physics 11 (2), 023004, 2009
42009
Ruddlesden-Popper Phase Formation in Pb(Zr,Ti)O3 Thin Films
G Suchaneck, VS Vidyarthi, G Gerlach, M Reibold, AA Levin, DC Meyer
Ferroelectrics 370 (1), 104-112, 2008
42008
Large area deposition of Pb(Zr,Ti)O3 thin films for piezoelectric MEMS devices
G Suchaneck, VS Vidyarthi, M Reibold, A Deyneka, L Jastrabik, G Gerlach, ...
Journal of electroceramics 20, 17-20, 2008
42008
Multi-target sputtering technology of Pb (Zr, Ti) O3 thin films for electron devices
VS VIDAYARTHI
TUDpress, 2008
42008
Methods for forming and etching structures for patterning processes
VS Vidyarthi, R Dhindsa
US Patent 10,727,058, 2020
32020
A 150 mm Wafer Technology for Highly (111) Oriented Pb(Zr,Ti)O3 Films on BaPbO3/Pt Electrode
VS Vidyarthi**, G Suchaneck, M Reibold, R Grötzschel, G Gerlach
Ferroelectrics 390 (1), 145-152, 2009
12009
Delayed pulsing for plasma processing of wafers
A Mehrotra, VS Vidyarthi, D Agarwal, S Sadighi, J Kenney, R Dhindsa
US Patent App. 18/378,251, 2024
2024
Delayed pulsing for plasma processing of wafers
A Mehrotra, VS Vidyarthi, D Agarwal, S Sadighi, J Kenney, R Dhindsa
US Patent 11,817,312, 2023
2023
Engineered Tungsten Oxy-Nitride Thin Film Materials for Photocatalytical Water Splitting Fabricated by MOCVD
AP Milanov, V Gwildies, S Cwik, T Thiede, V Vidyarthi, A Savan, R Meyer, ...
ECS Meeting Abstracts, 341, 2010
2010
Low voltage electron emission from [Pb (Mg {sub 1/3} Nb {sub 2/3}) O {sub 3}]{sub 0.72}[PbTiO {sub 3}]{sub 0.28} single crystals induced by ferroelectric polarization switching
O Mieth, LM Eng, VS Vidyarthi, G Gerlach, K Doerr
Verhandlungen der Deutschen Physikalischen Gesellschaft, 2009
2009
Errata for electron emission from ferroelectric thin films enhanced by the presence of 90° ferroelectric domains
G Suchaneck, VS Vidyarthi, O Mieth, G Gerlach, AV Solnyshkin
Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on 55 …, 2008
2008
Erratum: Electron emission from ferroelectric thin films enhanced by the presence of 90° ferroelectric domains (IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency …
G Suchaneck, VS Vidyarthi, G Gerlach, O Mieth, L Eng, AV Solnyshkin, ...
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 55 …, 2008
2008
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